Description
Edition details
- Author / contributors: Francis E. H. Tay (Editor)
- Publisher: Springer US
- Publication date: June 29, 2013
- Language: English
- ISBNs: 9781402071751; 9781475757910
- Digital formats: PDF
Materials & Process Integration for MEMS
€ 174,99
Materials & Process Integration for MEMS. An English-language digital edition by Francis E. H. Tay (Editor), available in PDF.
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Additional information
| Author | Francis E. H. Tay (Editor) |
|---|---|
| Publisher | Springer US |
| Language | English |
| ISBN | 9781402071751, 9781475757910 |
| Format | |
| Publication date | June 29, 2013 |
| DRM | DRM-free edition available |
| Download format | PDF (.pdf) |
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